LPM 23: Micro- and Nano-structuring 1

3:00 PM - 3:20 PM JST(6:00 AM - 6:20 AM UTC)

[30-04] Laser Micro-Patterning with Talbot Effect on Aluminum Film

Arafat Juan Paya Badar¹, *Yuan Jen Chang² (1. National Yunlin University of Science and Technology (Taiwan), 2. National Taipei University of Technology (Taiwan))

Keywords:

Micro-Patterning,Laser Processing,Talbot Effect,Photomask,Multi-structuring

C000076