Poster Session 2

Student presentation

[P-54] Inline measurement of processed structures using optical interferometry and feedback control of the shaped beam

*Hiromu Fujiki¹, Ren Umetsu¹, Yoshio Hayasaki¹, Satoshi Hasegawa¹ (1. Center for Optical Research and Education, Utsunomiya University (Japan))

Keywords:

Process monitoring and control,Inline measurement of processed structures,optical interferometry and feedback control of the shaped beam

C000322