Presentation Information
[P-55]Qualification of an automatic laser beam focus monitoring
implemented on a new ultrashort pulsed laser robot system
*Yongting Yang1, Daniel Franz1, Cemal Esen2, Ralf Hellmann1 (1. University of Applied Sciences Aschaffenburg (Germany), 2. Ruhr University Bochum (Germany))
Keywords:
ultrashort pulsed laser,laser robot,process monitoring,3d micromachining
C000035