Presentation Information
[P-70]In-line measurement of laser-processed shapes using optical interferometry and feedback control of shaped beams
*Hiromu Fujiki1, Ren Umetsu1, Satoshi Hasegawa1, Yoshio Hayasaki1 (1. Center for Optical Reserch and Education(CORE), Utsunomiya University (Japan))
Keywords:
femtosocond laser processing,feedback control of shaped beams,In-line measurement,optical interferometry
C000310