Presentation Information
[40-04]Influence of crystal orientation on the etch rate and crack formation of laser-modified sapphire using ultrashort pulsed NIR laser radiation
*Christian Peters1, Jacqueline Blok2, Martin Kratz1, Mehdi Behbahani2 (1. Fraunhofer ILT - Institute for Laser Technology (Germany), 2. Biomaterials Laboratory, FH Aachen - University of Applied Sciences (Germany))
Keywords:
selective laser-induced etching,SLE,sapphire,usp laser processing
C000299