[D08-14p-VI] Surface Modification

4:00 PM - 4:15 PM JST(7:00 AM - 7:15 AM UTC)

[D08-14p-VI-05] エキシマレーザーアニールによるamorphous-ITO薄膜の結晶化における蓄熱の効果

*keita katayama^1,2, Shinnosuke Uetsuki¹, Yifan Liu¹, Maiki Sato¹, Dongyang Guo¹, Hisato Yabuta^1,2 (1. Graduate School of Information Science and Electrical Engineering, Kyushu University, 2. Department of Gigaphoton Next GLP, Kyushu University)