Presentation Information

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)

[E09-15a-III-03]【論文発表賞応募演題】電子線励起アシスト光学顕微鏡の試料ダメージ低減に向けた電子光学系の検討

*Kohei Shimada¹, Yu Masuda¹, Wataru Inami^1,2, Kawata Yoshimasa² (1. Shizuoka Univ., Eng., 2. Shizuoka Univ., RIE)

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