[P01-15p-P] D: Laser processing

[P01-15p-P-17] 高効率レジスト剥離のためのレーザー照射条件の改善

*Yusuke Murakami¹, Samu Morishita², Yuta Asada¹, Takuto Enomoto¹, Motoya Kurosaki², Ryohei Yasukuni², Masashi Yoshimura³, Hideo Horibe⁴, Tomosumi Kamimura^2,3 (1. Osaka Institute of Technology, 2. Graduate School of Engineering, Osaka Institute of Technology, 3. Institute of Laser Engineering, The University of Osaka, 4. Graduate School of Engineering, Osaka Metropolitan University)