Presentation Information

[G3-O102-04]High Hall Mobility W-doped In2O3 Films with Thicknesses below 10 nm

*Tetsuya YAMAMOTO1, Hisashi Kitami2, Yugo Okada2 (1. Kochi Univ. Tech. (Japan), 2. SHI (Japan))

Keywords:

In2O3,Transparent conductive oxide films,Carrier transport,Disorder