[G3-O102] Oral 102

3:45 PM - 4:05 PM JST(6:45 AM - 7:05 AM UTC)

[G3-O102-05] Pressure Response of ZnO-Based Pressure Sensors with Mg_xZn_1-xO Thin Films Grown by Plasma-Assisted MBE

*Haruyuki Endo¹ (1. Tohoku Gakuin University (Japan))

Keywords:

ZnO,MgZnO,piezoelectricity,cylinder pressure sensor