[G3-O102] Oral 102

4:05 PM - 4:25 PM JST(7:05 AM - 7:25 AM UTC)

[G3-O102-06] Effect of Mist CVD Reactor Design on the Crystallinity and Morphology of ZnO Thin Films

*Htet Su Wai¹, Toshiyuki Kawaharamura¹ (1. Kochi University of Technology (Japan))

Keywords:

Zinc Oxide,Fine Channel Mist CVD System,Fine Channel Hot Wall Mist CVD System