[G3-O102] Oral 102

4:25 PM - 4:45 PM JST(7:25 AM - 7:45 AM UTC)

[G3-O102-07] Influence of growth temperature on the composition of ZnMgO thin films
Deposited by mist CVD

*Ryosuke Ohashi¹, Hetet Su Wai¹, Chiaki Watanabe¹, Tatsuki Okada¹, Toshiyuki Kawaharamura^1,2 (1. Kochi University of Technology (Japan), 2. Research Institute (Japan))

Keywords:

Mist CVD,ZnMgO,Semiconductor material oxide