[G3-O102] Oral 102

5:05 PM - 5:25 PM JST(8:05 AM - 8:25 AM UTC)

[G3-O102-09] Highly Conductive and Uniform Zicronium-Doped Tin Oxide Thin Films via Mist Chemical Vapor Deposition

*ABHAY KUMAR MONDAL¹, liu Kun¹,Htet Su¹,Toshiyuki Kawaharamura¹ (1. KOCHI UNIVERSITY OF TECHNOLOGY (Japan))

Keywords:

Zr doped SnO2,Resistivity and uniformity,Mist chemical vapor deposition