[G3-O202] Oral 202

3:15 PM - 3:35 PM JST(6:15 AM - 6:35 AM UTC)

[G3-O202-03] Operando Raman imaging analysis of semiconductor device structures with micro-four-point probes

*Naoka Nagamura^1,2,3, Gotoh Riku², Kenta Oishi² (1. NIMS (Japan), 2. Tokyo Univ. of Science (Japan), 3. Tohoku Univ. (Japan))

Keywords:

Raman spectroscopy,Multi-probe STM,Imaging,Transistor,Operando analysis