Presentation Information
[G3-P203-01]Fabrication of (Ga1-xInx)2O3 alloy films on a c-plane sapphire substrate by chemical solution deposition and their application to solar-blind ultra-violet photodetectors
*Akito Horibe1, Hiroto Tsuruyama1, Iori Yamasaki1, Shunsuke Enoki1, Nobuya Hiroshiba1, Masatoshi Koyama1, Kazuto Koike1 (1. Osaka Inst. of Tech., NMRC (Japan))
Keywords:
(Ga1-xInx)2O3,Chemical solution deposition,UV photodetector