Presentation Information
[G3-P203-04]On the Background Pressure of Sputtering Deposition Influencing CO2 Sensitivity of In2O3 TFT Sensor
*Yuichiro Ebisawa1, Yoshikazu Shin1, Kazuho Ishi1, Jin Hyeok Cha2, Tomohiro Yamaguchi1, Shinya Aikawa1 (1. Kogakuin Univ. (Japan), 2. Chonnam National Univ. (Korea))
Keywords:
Thin-film transistors,CO2 gas sensors,Crystal orientation,Surface absorbates