[G4-O102] Oral 102

3:30 PM - 3:45 PM JST(6:30 AM - 6:45 AM UTC)

[G4-O102-04] Preparation of metallic B-doped amorphous carbon films

*Yuji Muraoka¹, Subaru Nakashima², Sho Enomoto², Takanori Wakita³, Takayoshi Yokoya¹, Kohei Yamagami⁴ (1. Okayama Univ., RIIS (Japan), 2. Okayama Univ., ELST (Japan), 3. JASRI, Miyagi (Japan), 4. JASRI, Hyogo (Japan))

Keywords:

Metalization,Boron dope,Amorphous carbon,Film