[G4-O201] Oral 201

10:45 AM - 11:15 AM JST(1:45 AM - 2:15 AM UTC)

[G4-O201-03] Revisiting and Insight into the Stacking Faults in 4H-SiC for Power Devices

*SOON-KU HONG¹, Moonkyong Na², Hyundon Jung³, Wook Bahng² (1. Chungnam National Univ. (Korea), 2. Korea Electrotechnology Research Inst. (Korea), 3. Horiba STEC Korea (Korea))

Keywords:

4H-SiC,Frank-type stacking fault,HAADF HR-STEM,PL mapping,DFT