Presentation Information

[G4-P102-11]Sputter Growth of GaN Thin Films Utilizing Bayesian Optimization

*Akinori Saito1, Riki Kanetake1, Taiki Kobayashi1, Naoomi Yamada1 (1. Chubu Univ. (Japan))

Keywords:

GaN,Bayesian Optimization,Sputtering