Presentation Information
[G4-P102-11]Sputter Growth of GaN Thin Films Utilizing Bayesian Optimization
*Akinori Saito1, Riki Kanetake1, Taiki Kobayashi1, Naoomi Yamada1 (1. Chubu Univ. (Japan))
Keywords:
GaN,Bayesian Optimization,Sputtering
GaN,Bayesian Optimization,Sputtering