Presentation Information
[G4-P102-19]Epitaxial growth behavior of (ZnO)x(InN)1-x thin films on sapphire with 3D island buffer layers
*Satoshi Kumamoto1, Shotaro Hata1, Naoto Yamashita1, Kunihiro Kamataki1, Takamasa Okumura1, Kazunori Koga1, Masaharu Siratani1, Naho Itagaki1 (1. Kyushu Univ. (Japan))
Keywords:
(ZnO)x(InN)1-x,epitaxial growth,3D buffer layer,sputtering,strain relaxation