Presentation Information
[G4-P102-24]Study on the Electrical Conductivity of Amorphous (In2O3)1(ZnO)2 Composite Oxide Films
*Keiji Kaneyama1, Junjun Jia2, Non Fujimoto1, Koki Hayashida1, Hiroki Minegoshi1, Tetsuaki Nishida3, Nobuto Oka1 (1. Kindai Univ. (Japan), 2. Waseda Univ. (Japan), 3. Environmental Materials Inst. (Japan))
Keywords:
RF sputtering,transparent conductive films,amorphous oxide semiconductor