[G4-P202] Poster 202

[G4-P202-01] Investigation of the Crystallization Mechanism of Amorphous ITO Thin Films Induced by Laser Annealing

*DONGYANG GUO¹, Maiki Sato¹, Keita Katayama^1,2, Yohei Tanaka², Hisato Yabuta^1,2 (1. Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu Univ. (Japan), 2. Department of Gigaphoton Next GLP, Kyushu Univ. (Japan))

Keywords:

transparent conductive thin film,laser annealing,crystallization,indium tin oxide,excimer laser