[G4-P202] Poster 202

[G4-P202-02] Thermal Diffusion Mechanisms of Sn Doping into β-Ga2O3 Using a KrF Excimer Laser

*Yifan Liu¹, Misa Beppu¹, Keita Katayama^1,2, Yohei Tanaka², Hisato Yabuta^1,2 (1. Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu Univ. (Japan), 2. Department of Gigaphoton Next GLP, Kyushu Univ. (Japan))

Keywords:

laser doping,excimer laser,gallium oxide,thermal diffusion