[G4-P202] Poster 202

[G4-P202-03] Quantitative Evaluation of Momentum Transfer for Low-Temperature Crystallization using HiPIMS Synchronized Pulsed Substrate Bias

*Rina Watabe¹, Fuka Nishimura¹, Erdong Chen¹, Tetsuhide Shimizu¹ (1. Tokyo Metropolitan Univ. (Japan))

Keywords:

HiPIMS,synchronized pulsed substrate bias,momentum transfer,Tungsten