Presentation Information
[G4-P202-05]Sputter Epitaxy Of Zn1-xMgxO Thin Films On Sapphire Substrates Using Wurtzite MgO Buffers And ZnO Interlayers
*Hibiki Noguchi1, Hiroki Otsuyama1, Takafumi Yunoue1, Kotaro Yataka1, Naoto Yamashita1, Takamasa Okumura1, Kunihiro Kamataki1, Kazunori Koga1, Masaharu Shiratani1, Naho Itagaki1 (1. Kyushu Univ. (Japan))
Keywords:
Zn1-xMgxO,epitaxial growth,buffer layer,inverted SK growth,sputtering