Presentation Information
[G4-P202-06]Improvement of mosaic property of sputtered GaN thin film
*Riki Kanetake1, Akinori Saito1, Naoomi Yamada1 (1. Chubu.Univ. (Japan))
Keywords:
GaN,Sputtering,Mosaic Spread,X-ray Rocking Curve
GaN,Sputtering,Mosaic Spread,X-ray Rocking Curve