[G4-P202] Poster 202

[G4-P202-14] Stress Evolution and Crack Formation in ITO Thin Films under KrF Excimer Laser Annealing

*Maiki Sato¹, Dongyang Guo¹, Keita Katayama^1,2, Yohei Tanaka², Hisato Yabuta^1,2 (1. Grad. Sch. of ISEE, Kyushu Univ. (Japan), 2. Department of Gigaphoton NEXT GLP, Kyushu Univ. (Japan))

Keywords:

Indium Tin Oxide,excimer laser,laser annealing,internal stress,crack