[G4-P202] Poster 202

[G4-P202-20] Study on photo-response for visible light using titanium oxy-nitride films fabricated by plasma assisted deposition

*Takahisa ICHINOHE¹, Hideki Ohno¹, Seiichi Sato² (1. National Institute of Technology, Tokyo College (Japan), 2. Graduate School of Science, University of Hyogo (Japan))

Keywords:

photo-response,titanium oxy-nitride films,plasma enhanced oxidizing and nitriding