Presentation Information
[G4-P202-22]Single Cathode Combinatorial Thin Film Deposition Using ZnO and Ga2O3 Powder Target by Sputtering
*Tamiko Ohshima1, Gaku Yazaki1, Satoshi Takeichi2, Yusuke Hibino2, Takeshi Ihara2, Takahiko Satake2, Hiroharu Kawasaki2, Masaaki Yamazato3, Akihiro Ikeda4, Shin-ichi Aoqui4 (1. Nagasaki Univ. (Japan), 2. National Institute of Technology, Sasebo College (Japan), 3. Univ. of the Ryukyus (Japan), 4. Sojo Univ. (Japan))
Keywords:
Combinatorial thin film,Sputtering,Powder target