Presentation Information

[G4-P202-25]Sputtering deposition of Ga:ZnO films on polymer substrate

*Yasuji Yamada1, Shuhei Funaki1, Tetsuro Shibata1, Shiyu Sano1 (1. Shimane Univ. (Japan))

Keywords:

Transparent conducting film,PET,Flexible,Resistivity,Sheet resistance