Presentation Information
[G4-P202-25]Sputtering deposition of Ga:ZnO films on polymer substrate
*Yasuji Yamada1, Shuhei Funaki1, Tetsuro Shibata1, Shiyu Sano1 (1. Shimane Univ. (Japan))
Keywords:
Transparent conducting film,PET,Flexible,Resistivity,Sheet resistance
