[H1-O302] Oral 302

2:00 PM - 2:20 PM JST(5:00 AM - 5:20 AM UTC)

[H1-O302-03] Pulse Width Dependence of Ferroelectric Switching in AlScN films

*Hirofumi Nishida¹, Si-Meng Chen¹, Takuya Hoshii¹, Kazuo Tsutsui¹, Hitoshi Wakabayashi¹, Kuniyuki Kakushima¹ (1. Institute of Science Tokyo (Japan))

Keywords:

Ferroelectric AlScN films,MFM,coercive field