Presentation Information
[H1-P301-07]AR-HAXPES Evaluation of Chemical Bonding Changes in AlScN Induced by Plasma Oxidation and Nitridation
*Takuya Taniguchi1, Kazuki Goshima1, Yoshiharu Kirihara1, Yuuki Yamada1, Ryoichi Kawai1, Kuniyuki Kakushima2, Yuichiro Mitani1, Hiroshi Nohira1 (1. Tokyo city Univ. (Japan), 2. Inst. of Sci. Tokyo (Japan))
Keywords:
AlScN,AR-HAXPES,Chemical Bonding Changes
