[H1-P301] Poster 301

[H1-P301-09] Bottom Electrode Materials Dependent Ferroelectric Properties of AlScN Films

*Hitomi Hasegawa¹, Si-Meng Chen¹, Takuya Hoshii¹, Kazuo Tsutsui², Hitoshi Wakabayashi², Kuniyuki Kakushima¹ (1. Science Tokyo School of Eng. (Japan), 2. Science Tokyo IIR (Japan))

Keywords:

ferroelectric AlScN films,ferroelectric capacitor,metal electrode,PUND