Presentation Information

[H1-P301-10]Evaluation of the Effects of Plasma Treatment on Ferroelectric Al0.8Sc0.2N

*Kazuki Goshima1、Yuki Yamada1、Yoshiharu Kirihara1、Takuya Taniguchi1、Ryoichi Kawai1、Kuniyuki Kakushima2、Hiroshi Nohira1、Yuichiro Mitani1 (1. Tokyo City University (Japan)、2. Institute of Science Tokyo (Japan))

Keywords:

Ferroelectric Tunnel Junction,AlScN,AR-HAXPES