[H4-O501] Oral 501

9:00 AM - 9:40 AM JST(12:00 AM - 12:40 AM UTC)

[H4-O501-01] Development of Integrated Sensing Technologies for Real-Time Monitoring and Endpoint Detection in Plasma Chamber Processes

*Kyongnam Kim¹, Suyoung Jang¹, Dohyeun Kim¹, Junyeob Lee¹ (1. Daejeon University (Korea))

Keywords:

Plasma diagnostics,Endpoint detection,Polymer sensor