[H4-O501] Oral 501

10:40 AM - 11:00 AM JST(1:40 AM - 2:00 AM UTC)

[H4-O501-04] Gas composition analysis in hydrocarbon mixture plasmas by optical emission spectroscopy using machine learning with engineered spectral features

*Riku Tamura¹, Shuhei Takamatsu¹, Hitoshi Muneoka¹, Kazuo Terashima¹, Tsuyohito Ito¹ (1. The University of Tokyo (Japan))

Keywords:

machine learning,optical emission spectroscopy,hydrocarbon plasma,gas composition