[H4-P302] Poster 302

[H4-P302-01] Machine Learning-Driven Optimization of PECVD-Deposited DLC Films via Raman Spectra-Based PLS Regression

*Yoshihisa Osano^1,2, Tatsuyuki Nakatani^1,3 (1. Okayama Univ. of Sci. (Japan), 2. Mitsubishi Pencil Co., Ltd. (Japan), 3. Keio Univ. (Japan))

Keywords:

Diamond-like carbon,Raman spectroscopy,Multipeak fitting,Partial least squares regression