Presentation Information
[H4-P302-09]Effects of amplitude-modulated waveform excitation on spatio-temporal distribution of emission intensity of Ar 2p1 in Ar capacitively coupled plasmas
*Daichi Wakita1, Kazuki Nagamine1, Shunichi Takahashi1, Kunihiro Kamataki1, Takamasa Okumura1, Naho Itagaki1, Kazunori Koga1, Hasaharu Shiratani1 (1. Kyushu University (Japan))
Keywords:
MRM,Plasma,PROES,Amplitude Modulated Discharges