Presentation Information
[H4-P302-11]Influence of Nanoscale Carbon Nanoparticles on Macroscopic Stress and Adhesion in Hydrogenated Amorphous Carbon Films
*Shinjiro Ono1, Manato Eri1, Takamasa Okumura1, Kunihiro Kamataki1, Kazunori Koga1, Masaharu Shiratani1 (1. Kyushu University (Japan))
Keywords:
Carbon Nanoparticle,Nanoindentation,Amorphous Carbon Films