Mutiphase flow6

3:20 PM - 3:40 PM JST(6:20 AM - 6:40 AM UTC)

[6-05] Numerical and experimental evaluations of splashing droplets from the edge of a rotating disc

*Shintaro Aihara¹, Akira Ishimaru¹, Takeshi Matsuda^1,2, Norimasa Matsui¹, Masakazu Muto², Shinji Tamano² (1. SCREEN Holdings Co.,Ltd., 2. Nagoya Institute of Technology)

Keywords:

semiconductor cleaning,liquid film,two-phase flow,OpenFOAM,VOF