[WD3] Integrated Photonic Circuits and Platforms III

3:00 PM - 3:15 PM JST(6:00 AM - 6:15 AM UTC)

[WD3-3] Wafer-scale Platform of PLZT on SiO₂/Si Substrate toward Realizing High-Speed Optical Modulation

○Tomohiro Otani¹, Sohei Nonaka¹, Shiyoshi Yokoyama² (¹Mitsubishi Materials Corporation, ²Kyushu Univ.)

Keywords:

Si photonic and heterogeneous platform,Novel materials and platform for passive devices

Lanthanum doped lead zirconate titanate (PLZT) deposited on SiO₂/Si wafer was suggested as a new platform for fabricating optical modulators. This enabled a high-speed Mach-Zehnder modulator with V_piL=1.3 V･cm.