Presentation Information

[WD3-3]Wafer-scale Platform of PLZT on SiO2/Si Substrate toward Realizing High-Speed Optical Modulation

○Tomohiro Otani1, Sohei Nonaka1, Shiyoshi Yokoyama2 (1.Innovation Center, Mitsubishi Materials Corporation, 2.Institute for Materials Chemistry and Engineering, Kyushu University)

Keywords:

Si photonic and heterogeneous platform,Novel materials and platform for passive devices

Lanthanum doped lead zirconate titanate (PLZT) deposited on SiO2/Si wafer was suggested as a new platform for fabricating optical modulators. This enabled a high-speed Mach-Zehnder modulator with VpiL=1.3 V・cm.