Metrology

3:45 PM - 4:00 PM JST(6:45 AM - 7:00 AM UTC)

[OPTM2-01] Separation Method of Support-Induced Deformation Errors for Optical Components Based on Rotation Calibration and Model Correction

*Xiaochuan Hu^1,2,3, Xi Hou^1,2,3, Wei Huang^1,2,3, Yinhua Zhang^1,2,3, Yuancheng Zhao^1,2, Shuai Zhang^1,2 (1. National Key Laboratory of Optical Field Manipulation Science and Technology, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China, 2. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China, 3. University of Chinese Academy of Sciences, Beijing 100049, China)

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