Presentation Information
[OPTM2-04]Chromatic confocal microscopy with galvanometer scanning and CNN-based deconvolution for precise full-field surface profilometry
Wei-Chi Hung1, Ching-Chia Yen1, Han-Ju Tsai1, *Feng-Tse Chan1, Liang-Chia Chen1 (1. National Taiwan University, Department of Mechanical Engineering)