Surface Inspection

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)

[OPTM5-03] 3D detection of surface defects on ultra-precision curved optical elements based on micro structured-light

*Xi Hou^1,2,3, Mingze Li^1,2,3, Wenchuan Zhao^1,2,3, Shuai Zhang^1,2,3 (1. National Key Laboratory of Optical Field Manipulation Science and Technology, Chinese Academy of Sciences, 2. Institute of Optics and Electronics, Chinese Academy of Sciences, 3. University of Chinese Academy of Sciences)