Short wavelength light sources and applications

1:15 PM - 1:45 PM JST(4:15 AM - 4:45 AM UTC)

[ALPS-E1-01(Invited)] Compact Coherent EUV Light Sources: Recent Developments and Applications at QST-KPSI

*Thanh-Hung Dinh¹, Noboru Hasegawa¹, Masahiko Ishino¹, Hiroki Yamamoto², Shunsuke Yamada¹, Masayasu Hata¹, Shinichi Namba³, Takeshi Higashiguchi⁴ (1. Kansai Institute for Photon Science, National Institutes for Quantum Science and Technology (QST), 2. Takasaki Institute for Advanced Quantum Science, National Institutes for Quantum Science and Technology, 3. Hiroshima University, 4. Utsunomiya University)

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