Session Details
Short wavelength light sources and applications
Fri. Apr 24, 2026 1:15 PM - 2:45 PM JST
Fri. Apr 24, 2026 4:15 AM - 5:45 AM UTC
Fri. Apr 24, 2026 4:15 AM - 5:45 AM UTC
303 (Pacifico Yokohama Conference Center)
Session Chair: Kazuyuki Sakaue (The University of Tokyo), Kentaro Tomita (Hokkaido University)
[ALPS-E1-01(Invited)]Compact Coherent EUV Light Sources: Recent Developments and Applications at QST-KPSI
*Thanh-Hung Dinh1, Noboru Hasegawa1, Masahiko Ishino1, Hiroki Yamamoto2, Shunsuke Yamada1, Masayasu Hata1, Shinichi Namba3, Takeshi Higashiguchi4 (1. Kansai Institute for Photon Science, National Institutes for Quantum Science and Technology (QST), 2. Takasaki Institute for Advanced Quantum Science, National Institutes for Quantum Science and Technology, 3. Hiroshima University, 4. Utsunomiya University)
[ALPS-E1-02(Invited)]Development of a mid-infrared laser for next-generation EUV light sources
*Kentaro Sakai1, Shigeki Tokita2, Yuri Kirita2, Daiki Okazaki2, Atsushi Sunahara3, Tomoyuki Johzaki4,3, Ryo Yasuhara1 (1. National Institute for Fusion Science, 2. Kyoto University, 3. The University of Osaka, 4. Hiroshima University)
[ALPS-E1-03]Plasma Dynamics and Future of LPP-EUV Source for Semiconductor Manufacturing
*Hakaru Mizoguchi1 (1. Kyushu University)
[ALPS-E1-04]Time resolved electron Temperature and density diagnostics and EUV emissivity analysis for performance optimization of a tin laser assisted discharge EUV source.
*Hideyuki Sera1,2, Akihisa Nagano1, Kentaro Tomita2 (1. Ushio inc., 2. Hokkaido University)
