Presentation Information
[LEDIA4-06]Fabrication of Vertical AlGaN UV-B Laser Diodes through Substrate Exfoliation using Pressurized and Heated Water
*Eri Matsubara1, Yusuke Sasaki1, Takumu Saito1, Rintaro Miyake1, Sho Iwayama1, Hideto Miyake2, Tetsuya Takeuchi1, Satoshi Kamiyama1, Motoaki Iwaya1 (1. Meijo University, 2. Mie University)
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