Polarimetry and Ellipsometry

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)

[OPTM7-03] Angle-scanning micro-spot ellipsometry with hybrid metrology
strategies for critical dimension measurement of HAR microstructures

Yuan-Ci Lin¹, Fu-Sheng Yang¹, Bo-Chen Kuo², *Ting-Hui Huang¹, Surajit Das², . Manutious², Liang-Chia Chen^1,2 (1. Department of Mechanical Engineering, National Taiwan University, Taiwan, 2. Graduate School of Advanced Technology (GSAT), National Taiwan University, Taiwan)