Metrology

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[OPTM8-04] Back-Focal-Plane-Calibrated Angular Integration Modeling for High NA HAR Metrology

Bo-Chen Kuo¹, Fu-Sheng Yang², Yuan-Ci Lin², *Wei-Xiang Chou¹, . Manutious¹, Liang-Chia Chen^1,2 (1. Graduate school of Advanced Technology, National Taiwan University, Taipei, Taiwan, 2. Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan)