OPTICS & PHOTONICS International Congress 2026
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Session Details

OPTM2026 : Oral Presentation

Metrology

Wed. Apr 22, 2026 1:15 PM - 2:30 PM JST
Wed. Apr 22, 2026 4:15 AM - 5:30 AM UTC
213 (Pacifico Yokohama Conference Center)
Session Chair: Yasuhiro Mizutani, Naila Zahra
1:15 PM - 1:30 PM JST(4:15 AM - 4:30 AM UTC)

[OPTM8-01]The path to uncertainty estimations for PV, PVr, PV% and
RMS in surface form metrology

*Markus Schake1 (1. Physikalisch-Technische Bundesanstalt)
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1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)

[OPTM8-02]High-Density Thickness and Surface Profile Mapping of Large-Area Patterened Wafers Using Spectral Interferometry

*Jaeseok Bae1, Jonghan Jin1, Heulbi Ahn1 (1. Meter-Lab. Inc.)
Comment()
1:45 PM - 2:00 PM JST(4:45 AM - 5:00 AM UTC)

[OPTM8-03]Deep Learning-Based Thin-Film Metrology on Rough Surfaces

*Joonyoung Lee1, Jonghan Jin1 (1. Meter-lab. Inc.)
Comment()
2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[OPTM8-04]Back-Focal-Plane-Calibrated Angular Integration Modeling for High NA HAR Metrology

Bo-Chen Kuo1, Fu-Sheng Yang2, Yuan-Ci Lin2, *Wei-Xiang Chou1, . Manutious1, Liang-Chia Chen1,2 (1. Graduate school of Advanced Technology, National Taiwan University, Taipei, Taiwan, 2. Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan)
Comment()
2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)

[OPTM8-05]Advanced Optical Metrology and Edge Computing Architectures for Real-Time Nanobubble Monitoring

*Chao-Ching Ho1, CHIH-CHUN CHANG1, Yuan-Jen Chang1, Chia-Lung Kuo2 (1. National Taipei University of Technology, 2. National Yunlin University of Science and Technology)
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